SEMICONDUCTOR PRODUCTION SYSTEM

PROBLEM TO BE SOLVED: To realize a production system which can shorten a TAT and enhance a throughput without deteriorating the quality of products, by changing the conditions of inspection frequency and maintenance frequency which are effective for the quality during the manufacture of semiconducto...

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Bibliographische Detailangaben
Hauptverfasser:	ISHII MASAKATSU, ASHIHARA HIDEAKI, IWATA YOSHIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PERFORMING OPERATIONS PHYSICS REGULATING SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To realize a production system which can shorten a TAT and enhance a throughput without deteriorating the quality of products, by changing the conditions of inspection frequency and maintenance frequency which are effective for the quality during the manufacture of semiconductors in accordance with a condition of a production device. SOLUTION: A simulation for a production plan for articles to be processed is conducted in a planning part in accordance with data from a frequency control part for controlling the inspection frequency and the maintenance frequency for every product, every process step and every production device, and data from a production process control part for controlling the production process of an article to be processed. From the result of the simulation, load stacks of production works including inspection and a maintenance are calculated so as to determine whether a production norm is attained or not. If the production norm is not yet attained, a production device condition determining part determines a condition of the production device, and if it is determined that the condition is safe, the terms of the frequencies of the associated inspection and maintenance is set to be moderate, and the production plan is considered again, thereby making it possible to shorten the TAT and enhance the throughput, and further to enhance the production efficiency.