MATERIAL HAVING FLUOROPLASTIC FORMED ON SURFACE FLUORINATED PASSIVATED FILM AND VARIOUS DEVICES AND PARTS USING THE SAME

PROBLEM TO BE SOLVED: To provide a material capable of being inexpensively and easily produced within a short time, capable of forming a thick fluorocarbon film only on an objective surface, having sufficient corrosion resistance against corrosive gas or semiconductor process gas such as special gas...

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Bibliographische Detailangaben
Hauptverfasser:	YAZAKI YOJI, NITTA TAKEHISA, OMI TADAHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM METALLURGY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a material capable of being inexpensively and easily produced within a short time, capable of forming a thick fluorocarbon film only on an objective surface, having sufficient corrosion resistance against corrosive gas or semiconductor process gas such as special gas or the like, especially, against plasma and a chemical soln. and having fluoroplastic formed on the surface of a fluorinated passivated film transmitting ultrasonic waves. SOLUTION: A fluorinated passivated film is provided on the surface of a base metal material and fluoroplastic is formed on the surface of the fluorinated passivated film by electrostatic powder coating. Or, the fluorinated passivated film is provided on the surface of the base metal material and fluoroplastic is formed on the surface of the fluorinated passivated film by electrostatic powder coating to be irradiated with plasma.