INTEGRATED CIRCUIT
PROBLEM TO BE SOLVED: To conform a small TV window to a precursory fuse designing specification, which covers only a small space. SOLUTION: After the formation of a sensing soft passivation film 150, an etching stopper film 130 is used so as to set up a terminal through the intermediary of an apertu...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To conform a small TV window to a precursory fuse designing specification, which covers only a small space. SOLUTION: After the formation of a sensing soft passivation film 150, an etching stopper film 130 is used so as to set up a terminal through the intermediary of an aperture 132 to access a device feature part. As a result of etching film, the size of the terminal set up through the intermediary of the aperture 132 through an etching film is decided by decoupling with the decomposition activity of the existing photosensing soft passivation film 150. |
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