MAGNETIC HEAD SLIDER AND MANUFACTURE THEREOF

PROBLEM TO BE SOLVED: To enable introduction of a large quantity of hydroxyl groups into a slider surface layer, which is a surface to be treated by introducing activated oxygen into a region in contact with the slider surface and thus making an oxygen-rich state on the surface of the slider. SOLUTION: In a molecular structure of an oil-repellent film 6, terminal groups of CF3 , CF2 having an extremely low surface tension are provided on the outermost surface and are densely coupled with a slider protection film (carbon thin film 5) by silanol groups on a slider surface on the opposite side. In oil-repellent treatment, for example, when alkylalkoxysilane is dissolved in a solvent, it reacts with a minute quantity of moisture existing inside and the terminals come to have hydroxyl groups. On the other hand, with respect to the slider, a mixed gas obtained by mixing a sub-reactive gas of methanol or ethanol into an atmosphere gas of He under the atmospheric pressure is used, and a high frequency is applied to the mixed gas to generate a plasma. The magnetic head slider is input into the plasma and surface treatment is carried out. Thus, a part of methanol or ethanol is decomposed and a large quantity of hydroxyl groups can be introduced.