TRANSFER DEVICE

PROBLEM TO BE SOLVED: To shorten replacement time for wafers as well as entire process time including transfer, by vertically providing 2 pairs of first and second arms, while attached to a tip end of the second arm, and allowing independent operation of 2 holders to move straight in radial directio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KASHIMA HIDEO, KANETOMO MASABUMI, MATSUMURA YASUHIDE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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