TRANSFER DEVICE

PROBLEM TO BE SOLVED: To shorten replacement time for wafers as well as entire process time including transfer, by vertically providing 2 pairs of first and second arms, while attached to a tip end of the second arm, and allowing independent operation of 2 holders to move straight in radial direction. SOLUTION: With 2 pairs of arms allocated vertically, first left and right arms 17 and 18 (or 26 and 27) at upper part (or lower part) are attached with second arms 19 and 20 (or 28 and 29), with a holder 21 (or 30) fixed to a tip end. A wafer 1 is placed on the holder 21 (or 30). A gear 22 (or 30) fitted below the first light arm engages with a tip end gear 25 (or 34) of a drive motor 24 (or 33), and the first arm fitted to it rotates in reverse direction so that the holder 21 (or 30) moves straight in radial direction. Thus, no rotational action of an arm is required, resulting in shorter transfer time.