DEVICE FOR GROWING SINGLE CRYSTAL AND GROWTH OF SINGLE CRYSTAL

PROBLEM TO BE SOLVED: To prevent the drop of a single crystal having a large diameter and a large weight and surely and safely pull the single crystal in a depressurizied chamber. SOLUTION: A seed crystal 24a is immersed in melted Si liquid in a quartz crucible 14, and subsequently pulled up to form...

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Bibliographische Detailangaben
1. Verfasser: YAMAGISHI HIROTOSHI
Format: Patent
Sprache:eng
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