DEVICE FOR GROWING SINGLE CRYSTAL AND GROWTH OF SINGLE CRYSTAL

PROBLEM TO BE SOLVED: To prevent the drop of a single crystal having a large diameter and a large weight and surely and safely pull the single crystal in a depressurizied chamber. SOLUTION: A seed crystal 24a is immersed in melted Si liquid in a quartz crucible 14, and subsequently pulled up to form...

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1. Verfasser: YAMAGISHI HIROTOSHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To prevent the drop of a single crystal having a large diameter and a large weight and surely and safely pull the single crystal in a depressurizied chamber. SOLUTION: A seed crystal 24a is immersed in melted Si liquid in a quartz crucible 14, and subsequently pulled up to form a neck portion 1a having a small diameter under the seed crystal 24a. A ball-like constricted part 1b is then formed under the neck portion 1a. At the time, the tips of single crystal supports 23 are opened each other so as not to bring into contact with the constricted portion 1b which is being pulled up. When the second net portion 1c under the constricted portion 1b is pulled up the waiting positions of the tips of the single crystal supports 23, the rotation of a circular member 20a is started, and rotation shafts 22 are also rotated in the clockwise direction. The tips 23a of the single crystal supports 23 are thereby closed each other to hold a portion under the constricted portion 1b. Rotational ball screw shafts 21 are simultaneously rotated to raise the single crystal supports 23 at the same speed as that of a wire 3.