FORMATION OF REFLECTION MIRROR FOR SURFACE WAVEGUIDE OF OPTICAL INTEGRATEDCIRCUIT

PROBLEM TO BE SOLVED: To rapidly form a reflection mirror at low cost by making a light beam incident on a cladding layer at least at one angle to a circuit and obtaining a deflection angle corresponding to a deflection surface. SOLUTION: A laser 130 makes the light beam 140 go in a direction to enter the specified area of the optical integrated circuit 150 near to the surface waveguide 155. The light beam 140 is made to go toward the area at the specified angle to a Y-axis extended perpendicularly to the surface of the circuit 150. The light beam 140 is made to go and enter the cladding 160 of quartz glass with sufficient energy within a specified wavelength range continuously for a time long enough to gasify the quartz glass in the area, and forms a groove extended passing through the waveguide 155 and angled at a specified angle. Thus, an edge surface where the groove angled at the specified angle is formed constitutes the deflection surface of the constitution of the reflection mirror.