ROTARY COATING METHOD AND ROTARY COATING DEVICE

PROBLEM TO BE SOLVED: To sufficiently cope with a large sized body to be coated or a body to be coated, which is required to make a film thin, by remarkably increasing the number of rotations (speed), at which the unevenness of coating film thickness due to the turbulence of air stream is generated....

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Bibliographische Detailangaben
Hauptverfasser:	TACHIKAWA YUICHI, NAKAMURA YOSHIAKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPARATUS SPECIALLY ADAPTED THEREFOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To sufficiently cope with a large sized body to be coated or a body to be coated, which is required to make a film thin, by remarkably increasing the number of rotations (speed), at which the unevenness of coating film thickness due to the turbulence of air stream is generated. SOLUTION: In a rotary coating device for forming a coating film on the surface of the body 1 to be coated by spreading a coating liquid 5 on the body 1 to be coated with a centrifugal force by rotating the body 1 to be coated, on which the coating liquid is dropped, gas supply and ventilating means 21, 22, 23, 24 for supplying a gas to the body 1 to be coated, on which the coating liquid 5 is stuck, and for forcibly forming a gas stream flowing along the surface of the body 1 to be coated with the coating liquid 5 by the rotation of the body 1 to be coated and ventilating are provided.