SUBSTRATE HOUSING ENCLOSURE AND METHOD OF TREATING SUBSTRATES

PROBLEM TO BE SOLVED: To provide a substrate housing enclosure which prevents a semiconductor element manufacturing substrate form contamination and the semiconductor element on this substrate from electrostatic breakdown. SOLUTION: A slot plate A 2 for forming a substrate housing container for hous...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	AMADA HARUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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