PARTICLE SAMPLING APPARATUS AND ITS DRIVING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM BY APPLICATION OF THIS

PROBLEM TO BE SOLVED: To increase the reliability of analysis by controlling respective air valves, separating values, pumps, etc., between each of purge lines and by-pass lines, and a sampling line containing a particle sampler and a pump. SOLUTION: In a sampling line, a sampling port 24, a fourth...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BOKU KITEI, KYO SEITETSU, SAI HYAKUJUN, KIN CHINSEI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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