PATTERN DEFECT INSPECTION METHOD AND DEVICE THEREFOR

PROBLEM TO BE SOLVED: To provide an inspection method by which such an error is not judged as a defect even if there are deformation, strain of patterns and a positioning error between a standard pattern and an inspection object detecting pattern in a wiring board by applying a different inspection...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HARA YASUHIKO, KOBAYASHI HARUOMI, SASADA MASATO, INOUE MITSUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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