PIEZOELECTRIC RESONATOR MEASURING DEVICE

PROBLEM TO BE SOLVED: To selectively inspect a piezoelectric resonator (DUT) in the process before electrodes are formed by mounting one DUT piezoelectric face on a lower electrode, and measuring the transmission characteristic of the DUT in no contact between the other DUT piezoelectric face and an upper electrode. SOLUTION: A lower electrode 21 and an upper electrode 22 are connected to a transmission measuring device 50, a DUT formed with no electrode thin film is mounted on the lower electrode 21, and the transmission characteristic of the DUT is measured in no contact and at an electrically couplable prescribed proximity gap interval between the upper electrode 22 and the DUT. The series resonance frequency of the DUT is specified based on the amplitude transition of the measured transmission characteristic. There is the correlation of a fixed offset frequency between the obtained resonance frequency and the resonance frequency after the electrode thin film is formed, thus the correlation is obtained in advance for a quality judgment. The formation of useless electrodes on a defective DUT is resolved, and the application to an inclined conveying mechanism is facilitated.