CATHODE ARC VAPOR DEPOSITION DEVICE

PROBLEM TO BE SOLVED: To provide a cathode arc vapor deposition device good in the cost effectiveness and capable of executing uniform coating with high quality on a substrate. SOLUTION: A device 10 for coating the surface of a substrate 12 with a material by a cathode arc vapor deposition method ha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NOETZEL ALLAN A, MARSZAL DEAN N, BEERS RUSSELL A, WRIGHT ROBERT J, HENDRICKS ROBERT E
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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