CATHODE ARC VAPOR DEPOSITION DEVICE

PROBLEM TO BE SOLVED: To provide a cathode arc vapor deposition device good in the cost effectiveness and capable of executing uniform coating with high quality on a substrate. SOLUTION: A device 10 for coating the surface of a substrate 12 with a material by a cathode arc vapor deposition method ha...

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Bibliographische Detailangaben
Hauptverfasser:	NOETZEL ALLAN A, MARSZAL DEAN N, BEERS RUSSELL A, WRIGHT ROBERT J, HENDRICKS ROBERT E
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a cathode arc vapor deposition device good in the cost effectiveness and capable of executing uniform coating with high quality on a substrate. SOLUTION: A device 10 for coating the surface of a substrate 12 with a material by a cathode arc vapor deposition method has a vessel 14, a device 16 for keeping this vessel vacuum, an annular cathode 18 stretching between a primary edge face and a secondary edge face and having an evaporating face 44 provided with an opening part, a means 24 for selectively maintaining the electric energy of an arc between the cathode 18 and an anode 26 and a device for moving the arc to the cathode. The device 74 for moving the arc is arranged at the opening part of the cathode 18 and substantially generates the magnetic field stretching parallel to the evaporating face 44. The annular anode 26 is, on the inside in the radial direction of the substrate 12 arranged in the vessel, allowed to stand in a row with this.