PURIFYING METHOD OF SILANE FLUORIDE

PURIFYING METHOD OF SILANE FLUORIDE

PROBLEM TO BE SOLVED: To simply, efficiently and completely remove hydrogen chloride by reaction while suppressing the disproportionation of silane fluoride by allowing the silane fluoride containing hydrogen chloride to contact with metal zinc. SOLUTION: Hydrogen chloride is removed by reaction by...

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1. Verfasser: OHASHI MITSUYA
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Zusammenfassung:PROBLEM TO BE SOLVED: To simply, efficiently and completely remove hydrogen chloride by reaction while suppressing the disproportionation of silane fluoride by allowing the silane fluoride containing hydrogen chloride to contact with metal zinc. SOLUTION: Hydrogen chloride is removed by reaction by allowing the silane fluoride (Six Hy F2+2y-y ) ((x) represents integers of >=1, (y) represents integers of >=0 to =10 min is preferably used to prevent the lowering of purity of silane fluoride by the disproportionation.