ELECTRICAL CAPACITANCE TYPE EXTERNAL FORCE DETECTING DEVICE

PROBLEM TO BE SOLVED: To improve the resolving power of electrical capacitance so as to improve the detecting sensitivity to external force by reducing noise generated from a conversion circuit part. SOLUTION: A detecting part 33 detecting external force such as acceleration or angular velocity as c...

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Bibliographische Detailangaben
1. Verfasser:	YACHI KANEO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To improve the resolving power of electrical capacitance so as to improve the detecting sensitivity to external force by reducing noise generated from a conversion circuit part. SOLUTION: A detecting part 33 detecting external force such as acceleration or angular velocity as change of capacitance, and a conversion circuit part 37 converting capacitance output from the detecting part 33 to voltage, are integratedly formed on a substrate 32. The conversion circuit part 37 is constituted of a source follower circuit using a junction type electric field effect transistor 39. Hereby, because the number of circuit elements constituting the conversion circuit part 37 is reduced, noise of the conversion circuit part 37 is reduced. In addition, the noise of the conversion circuit part 37 is reduced by the excellent noise characteristic of the junction type electric field effect transistor.