SUBSTRATE TREATMENT DEVICE

PROBLEM TO BE SOLVED: To provide a substrate treatment device capable of preventing lowering of a treatment quality due to uneven drying of the substrate. SOLUTION: A substrate carrier device 21 is provided with a running member 23 capable of reciprocating running in the X-direction, a supporting me...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HAYASHI TOKUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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