SCAN TYPE PROBE MICROSCOPE

PROBLEM TO BE SOLVED: To provide an inverted type optical microscope incorporated type scan type probe microscope prevented from occurrence of deformation in a stage due to temp. fluctuation in peripheral atmosphere. SOLUTION: A scan type probe microscope(SPM) unit 30 is arranged on an upper side of a specimen stage 20 placing a slide glass placing a specimen. A cover 28 shutting off the atmosphere touching the upper surface of the specimen stage 20 from the outside in cooperation with the stage 20 is set properly on the specimen stage 20. A revolver 54 attached with plural objective lenses having different magnifications is placed under the specimen stage 20, and by rotating it, the objective lens 52 with the prescribed magnification is arranged on an optical path. The specimen 20 is provided with an opening enabling the optical observation by the objective lens 52. The central part around the opening is formed thin in a tapered-shaped so as not to disterb the rotation of the objective lenses 52. An adiabatic member 22 is provided on the bottom surface of this tapered-shape thin part.