METHOD OF ANALYZING CONTAMINANT, DEVICE THEREFOR, AND CLEAN ROOM

PROBLEM TO BE SOLVED: To precisely analyze a trace amount of an organic contaminant by exposing the organic contaminant adhered to a wafer surface to the vapor of a solution to evaporate it, and scavenging it into a scavenging vessel. SOLUTION: A valve 11 is switched to a gas cylinder 9 side to supply a fixed quantity of an inert gas such as argon (carrier gas) into a solution evaporating chamber 10 and a wafer setting chamber 20 by a pump 12. When the chamber 10 is then heated by a heater 4, an acetone solution 3 or the like in the solution tank 2 is laid in saturated state by receiving a high steam pressure, filled in the chamber 10, and carried to the chamber 20 together with the carrier gas. An organic contaminant adhered to the surface of a wafer 6 set within the chamber 20 is evaporated and removed by the vapor of the solution 3, and carried to a scavenging vessel 30 together with the vapor of the solution and the carrier gas. In the scavenging vessel, 30, the contaminant is scavenged by a solid scavenger 8, then eluted and recovered from the scavenger 8 by a solution such as organic solvent, and quantitatively and qualitatively analyzed.