ON-LINE DECOMPOSING METHOD FOR HYDROGEN PEROXIDE SOLUTION IN SEMI-CONDUCTOR PRODUCTION PROCESS AND DECOMPOSING METHOD THEREOF

PROBLEM TO BE SOLVED: To decrease the concentration of hydrogen peroxide in a hydrogen peroxide solution by forming a membrane tube having a platinum catalyst enclosed and fixed inside with a porous cap used and composed of a material of permeating a gas, but not liquid. SOLUTION: Disk-shaped caps 1...

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Bibliographische Detailangaben
Hauptverfasser:	RI TOSHU, KYO SEITETSU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SEMICONDUCTOR DEVICES SEPARATION TESTING THEIR RELEVANT APPARATUS TRANSPORTING TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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