ON-LINE DECOMPOSING METHOD FOR HYDROGEN PEROXIDE SOLUTION IN SEMI-CONDUCTOR PRODUCTION PROCESS AND DECOMPOSING METHOD THEREOF

PROBLEM TO BE SOLVED: To decrease the concentration of hydrogen peroxide in a hydrogen peroxide solution by forming a membrane tube having a platinum catalyst enclosed and fixed inside with a porous cap used and composed of a material of permeating a gas, but not liquid. SOLUTION: Disk-shaped caps 1...

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Bibliographische Detailangaben
Hauptverfasser:	RI TOSHU, KYO SEITETSU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SEMICONDUCTOR DEVICES SEPARATION TESTING THEIR RELEVANT APPARATUS TRANSPORTING TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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Zusammenfassung:	PROBLEM TO BE SOLVED: To decrease the concentration of hydrogen peroxide in a hydrogen peroxide solution by forming a membrane tube having a platinum catalyst enclosed and fixed inside with a porous cap used and composed of a material of permeating a gas, but not liquid. SOLUTION: Disk-shaped caps 14, 14' made of a polymer based porous material, e.g. Teflon (R) resin are engaged in the inside of both connecting parts of the membrane tube 12 and the platinum catalyst 16 is fixed and enclosed between the caps 14, 14'. As a result, the hydrogen peroxide solution supplied to the membrane tube 12 through a 1st connecting pipe 22 connected to a sample supply pump is decomposed into water and gaseous oxygen at high rate by the action of the platinum catalyst 16 to decrease the concentration of hydrogen peroxide in the hydrogen peroxide solution. The hydrogen peroxide solution decreased in concentration is injected to an analyzer through a sample injector connected to a 2nd connecting tube 24 to enable to be automatically analyzed in on-line mode.