MANUFACTURE OF SURFACE WHICH IMPROVES ADHESION OF DIELECTRIC LAYER

PROBLEM TO BE SOLVED: To improve connection of a dielectric material such as a ceramic material which is subjected to plasma flame-spraying and a lower surface such as a metallic electrostatic chuck pedestal by providing a dielectric material in close contact with a lower part material with an under...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	DONDE ARIK
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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