METHOD AND APPARATUS FOR DETECTING FINE LINEAR DEFECT

PROBLEM TO BE SOLVED: To highly accurately extract a linear defect without changing parameters for each extraction of an object. SOLUTION: A method for detecting a fine linear defect from an image with an object to be detected picked up comprises steps of performing normalization processing on an im...

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Bibliographische Detailangaben
Hauptverfasser: MISONO SHOHEI, DEGAWA SADAO, KONO YUKIHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To highly accurately extract a linear defect without changing parameters for each extraction of an object. SOLUTION: A method for detecting a fine linear defect from an image with an object to be detected picked up comprises steps of performing normalization processing on an image, thereafter integrating linear defects 41b, d, f of multiple stages of a concentration range (T1 to T4 ) contiguous with a linear defect 41a when binary-coded by a low threshold value T1 which can remove a noise 42 from the normalized image by a multiple stage slicing scheme for detecting this as a candidate for a linear defect 41i and detecting a fine linear defect by coupling local defect regions and coupling general flaw regions.