DEFECT INSPECTING DEVICE, DEFECT INSPECTING METHOD, AND FLATNESS INSPECTING DEVICE

PROBLEM TO BE SOLVED: To avoid deterioration in defect inspecting sensitiveness and to facilitate flatness detection of an object to be inspected by releasing air, which is caught up in a space between a pellicle and a stage or expanded by heat, to the outside so as to prevent expansion of a pellicle surface. SOLUTION: Ventilation of a space between a pellicle 1 and a stage 31 is maintained via a space formed by a vertical level difference between projection parts 32, 33 and a mounting face of the stage 31, and air, which is caught between the pellicle 1 and the stage 31 or expanded because of heat by a light beam L1, can be released to the outside via this space. A defect inspecting device 30 can prevent deterioration, which is caused because of expansion of the surface of the pellicle 1, of luminance in a light beam L1 irradiation position, so that deterioration of detection sensitiveness for a foreign matter 16 can be avoided. The light beam L1 performs a scan in the X-axis direction on the surface of the pellicle 1, so that flatness of the pellicle 1 surface can be detected when distortion of the formed scanning line is detected.