CLEAN BENCH FOR SUBSTRATE TREATMENT EQUIPMENT
PROBLEM TO BE SOLVED: To supply clean air to a wafer treatment equipment which removes alkali components, such as ammonia and the like, generated in the treatment equipment and cleaning the air without the use of chemical filters. SOLUTION: Air, recovered from an equipment for treating resist, is ta...
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| creator | SENBA NORIO KITANO JUNICHI KATANO TAKAYUKI |
| description | PROBLEM TO BE SOLVED: To supply clean air to a wafer treatment equipment which removes alkali components, such as ammonia and the like, generated in the treatment equipment and cleaning the air without the use of chemical filters. SOLUTION: Air, recovered from an equipment for treating resist, is taken from an intake 111 and flows from down to up in an air flow path. A first impurity removal section 130 and a second impurity removal section 150 are arranged above and below in a multistage. Pure water from spray nozzles 131a and 151a is sprayed uniformly to distribution mats 132 and 152 via air- water contact spaces M1 and M2 , and seeps uniformly into the distribution mats 132 and 152. The recovered air makes contact with the pure water in the distribution mats 132 and 152 and the air-water contact spaces M1 and M2 , and impurities such as alkali component and the like are removed. |
| format | Patent |
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SOLUTION: Air, recovered from an equipment for treating resist, is taken from an intake 111 and flows from down to up in an air flow path. A first impurity removal section 130 and a second impurity removal section 150 are arranged above and below in a multistage. Pure water from spray nozzles 131a and 151a is sprayed uniformly to distribution mats 132 and 152 via air- water contact spaces M1 and M2 , and seeps uniformly into the distribution mats 132 and 152. 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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING |
| title | CLEAN BENCH FOR SUBSTRATE TREATMENT EQUIPMENT |
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