TEMPERATURE CONTROLLER UTILIZING HEAT PIPE

PROBLEM TO BE SOLVED: To realize a high soaking ability while achieving a fast heating and cooling. SOLUTION: In this apparatus, a substrate 1 as object to be controlled is carried on the top surface of a heat panel 2. A fine heat pipe net is formed at an even density on the heat panel over almost t...

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Bibliographische Detailangaben
1. Verfasser:	KADOTANI KANICHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS BLASTING CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HEAT EXCHANGE IN GENERAL HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS,IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT HEATING HOLOGRAPHY LIGHTING MATERIALS THEREFOR MECHANICAL ENGINEERING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To realize a high soaking ability while achieving a fast heating and cooling. SOLUTION: In this apparatus, a substrate 1 as object to be controlled is carried on the top surface of a heat panel 2. A fine heat pipe net is formed at an even density on the heat panel over almost the entire surface thereof, It is desired that the top surface of the heat panel 2 is made flat and the undersurface thereof uneven. A shower of a low temperature liquid is blown onto the undersurface of the heat panel 2 from a number of injection nozzles 6 during the cooling period and during the heating period, a shower of infrared rays irradiates it from a number of lamps 23. The injection nozzles 6 and the lamps 23 are so designed that the showers of liquid and infrared rays evenly hit the entire undersurface of the heat panel 2.