ELECTROSTATIC CHUCK HAVING UNIDIRECTIONAL CONDUCTIVE COUPLER LAYER

PROBLEM TO BE SOLVED: To lessen a leakage and a fluctuation of electric charge, and to limit damage to an electrostatic chuck and stripping of the chuck, by a method wherein a unidirectional conductive coupler layer is made to bond to the electrical contact surface of the member, and the charge is m...

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Bibliographische Detailangaben
Hauptverfasser:	KHOLODENKO ARNOLD, VEYTSER ALEXANDER M, SHAMOUILIAN SHAMOUIL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To lessen a leakage and a fluctuation of electric charge, and to limit damage to an electrostatic chuck and stripping of the chuck, by a method wherein a unidirectional conductive coupler layer is made to bond to the electrical contact surface of the member, and the charge is made to have conduction only in roughly one direction from a voltage feeding terminal to the electrical contact surface to give the amount of electricity to the electrode. SOLUTION: An electrostatic chuck 20 is provided with a base 22 having a through hole 24, and this base 22 is proper to support an electrostatic member 25. A voltage feeding terminal 65 is electrically coupled with a contact surface 48 of the member 25 and is bonded to the surface 48 by a unidirectional conductive coupler layer 70 through an electrical connector 50, and a current is made to have conduction only in the single direction from the terminal 65 to an electrode on the member 25. The current results in being made to flow directly to the electrode in one direction intersecting orthogonally the surface of the layer 70 by the layer 70, and the loss of the current, which is made to flow through the conductive base 22 encircling this current, can be reduced to the minimum. As a result, a leakage of the charge, which is made to flow through the electrode, and fluctuation of the charge are lessened and damage to the chuck 20 and stripping of the chuck 20 can be limited.