ENERGY DISPERSION TYPE SEMICONDUCTOR X-RAY DETECTOR
PROBLEM TO BE SOLVED: To provide an energy dispersion type semiconductor X-ray detector which is designed so that even if a connecting pipe is vibrated as the result of gas circulation, the vibration is not transmitted to a cryostat. SOLUTION: An energy dispersion type semiconductor X-ray detector 3...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an energy dispersion type semiconductor X-ray detector which is designed so that even if a connecting pipe is vibrated as the result of gas circulation, the vibration is not transmitted to a cryostat. SOLUTION: An energy dispersion type semiconductor X-ray detector 3 has a small gas circulation type refrigerator 5 provided in a cryostat 4 sliding in a predetermined direction, supplies helium gas to the refrigerator via a connecting pipe 21, and cools an X-ray detecting element 8 using the refrigerator. In this case, the connecting pipe main body part 21a of the connecting pipe 21 connected to a pressure transducing valve unit 18 is extended along a vibration control sand 23 and is securely held thereon. |
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