PROBE CARD WITH PARALLELISM REGULATOR

PROBLEM TO BE SOLVED: To eliminate the damage of a measuring terminal by providing a parallelism regulator formed of a plurality of screws, and regulating the parallelism of the surface formed by the measuring terminal tip part to the plane of a matter to be measured. SOLUTION: As a parallelism regulator, a plurality of screws are used. A measuring terminal mounting base 2 has screw holes in four corners and the center part. Measuring terminals 1 are put and fixed onto the measuring terminal mounting base 2, and their tip heights are uniformed by polishing. Cone point set screws cone hexagon holes are screwed to the screw holes in the four corners of the measuring terminal mounting base 2, and the whole measuring terminal mounting base 2 is fixed on the base 5 of a probe card while calculating the delivering portions of regulating screws 3 in parallel regulation. The probe card is mounted on a surface plate on the basis of the base surface of the probe card having a positional relation rightly opposed to the plane of a matter to be measured, the regulating screws 3 on the four corners are delivered and substantially regulated so that the base is substantially parallel to the virtual surface formed by the tip parts of a plurality of measuring terminals by the eyes. Further, a minute parallelism fitting is performed by the regulating screws 3.