LOADING/UNLOADING OF EVACUATABLE PROCESS CHAMBER AND APPARATUS FOR EXECUTING THE SAME

PROBLEM TO BE SOLVED: To provide a loading/unloading device capable of minimizing the cycle time of the deposition process in a vacuum apparatus under the use of simple means. SOLUTION: At least one sliding shift sections 26, 26' rotatable around a revolving shaft 42 in the fixed position of th...

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Bibliographische Detailangaben
Hauptverfasser:	ICKES GERD, HENRICH JUERGEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a loading/unloading device capable of minimizing the cycle time of the deposition process in a vacuum apparatus under the use of simple means. SOLUTION: At least one sliding shift sections 26, 26' rotatable around a revolving shaft 42 in the fixed position of the space relative to an opening 24 are made shiftable radially with respect to the revolving shaft by lever transmission devices 23, 23'. These lever transmission devices have push/pull rods 40, 40' which are pivotally fixed at their one-side ends to hermetic caps 14, 14' and are pivotally fixed at an arm 38 which are fixed and coupled to the revolving shaft at their other ends. At least one glipper devices 10, 10' for receiving works and transporting the works are arranged at the sliding shift sections 26, 26'. The ends on the side pivotally fitted to the hermetic caps of the push/pull rods are made shiftable between the open position P2 proximate to the revolving shaft and the close position distant from the revolving shaft in the radial direction with respect to the revolving shaft by the turning of the revolving shaft.