RAIL STRUCTURE OF CASSETTE CONVEYING CARRIAGE

PROBLEM TO BE SOLVED: To surely discharge dust generated in a rail part to the outside of a clean room by forming a dust collecting chamber along the longitudinal direction via a partition wall, in which multiple small holes are bored, in a rail provided with a C-shaped cross section. SOLUTION: On a ceiling face 3 or a wall face inside a clean room, a rail 1 provided with a C-shaped cross section is arranged via a stay 6 with its opening part directed toward the inside of the clean room. The rail 1 is provided with a rail cover 10 which covers the opening part so that dust generated in contact between a traveling wheel 22, guide rollers 23a, 23b, 24 is not discharged to the inside of the clean room. In the rail 1, a dust collecting chamber 12 is also formed in the depth of a rail inside chamber 13 along the longitudinal direction via a partition wall 11 in which multiple small holes 14 are bored. In this way, dust generated in the rail 1 part can be uniformly sucked with the air inside the rail inside chamber 13 to the dust collecting chamber 12 via an exhaust port 18a arranged in the longitudinal direction position by means of an exhaust fan 5 so as to be surely discharged to the outside of the clean room.