MANUFACTURE OF CAPACITOR ELECTRODE CONSISTING OF PLATINUM METAL

PROBLEM TO BE SOLVED: To provide a manufacturing method of a capacitor electrode requiring no etching method and consisting of a platinum metal, and to use this manufacturing method for the manufacturing process of a cell for a DRAM having a high dielectric or a ferroelectric substance as a memory d...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WEINRICH VOLKER, MAZURE-ESPEJO CARLOS, SCHINDLER GUENTHER DR, HARTNER WALTER
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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