MANUFACTURE OF IMAGE DISPLAY DEVICE

PROBLEM TO BE SOLVED: To form a ultraviolet ray shielding film with a uniform and sufficient thickness and to prevent the contamination of the ultraviolet ray shielding film and an oriented film in the forming process, by forming the ultraviolet ray shielding film on a dielectric thin plate by means...

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Bibliographische Detailangaben
1. Verfasser: SHIMAMURA TOSHIKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To form a ultraviolet ray shielding film with a uniform and sufficient thickness and to prevent the contamination of the ultraviolet ray shielding film and an oriented film in the forming process, by forming the ultraviolet ray shielding film on a dielectric thin plate by means of a thin film forming method using a plasma generated in a plasma cell. SOLUTION: First, discharge electrodes (anode electrode 9A, cathode electrode 9K) and a partition 10 are formed on a lower substrate 8. A frit seal 1 is provided in the outer peripheral edge part of the lower substrate 8 on which discharge electrodes 9A, 9K and the partition 10 are provided and, by arranging a dielectric thin film 3 on which an oriented film 13 is formed through the frit seal 11, a plasma cell 2 is formed. Two vents of an introducing port and an exhaust port for gas exhaust or introduction are provided in the plasma cell 2. Consequently, after forming the plasma cell 2 in such a manner, a plasma is made to be generated in the plasma cell 2 and the ultraviolet ray shielding film 14 is formed on the dielectric thin plate 3 by a plasma CVD method.