NOVEL POLYMER AND PHOTORESIST COMPOSITION CONTAINING SAME

PROBLEM TO BE SOLVED: To provide a photoresist composition comprising the specified novel polymer and a photosensitive component and extending aromatic group or polynucleas aromatic group using this polymer as a resin binder component having repeat unit. SOLUTION: This polymer of this invention has...

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Bibliographische Detailangaben
1. Verfasser: JACK H GEORGER JR
Format: Patent
Sprache:eng
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