NOVEL POLYMER AND PHOTORESIST COMPOSITION CONTAINING SAME
PROBLEM TO BE SOLVED: To provide a photoresist composition comprising the specified novel polymer and a photosensitive component and extending aromatic group or polynucleas aromatic group using this polymer as a resin binder component having repeat unit. SOLUTION: This polymer of this invention has...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a photoresist composition comprising the specified novel polymer and a photosensitive component and extending aromatic group or polynucleas aromatic group using this polymer as a resin binder component having repeat unit. SOLUTION: This polymer of this invention has usually a high carbon content and at lest one kind of repeating unit including an aromatic part. It is preferred that this polymer has repeating units each having an expanded aromatic ring or >=2 rings, preferably, at least 2 rings condensed with each other, and each ring having a 3--8-membered ring inside this ring, and the photoresist in this invention comprises both positive and negative compositions and the binder component including the above polymer component. |
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