DISTANCE SENSOR DEVICE
PROBLEM TO BE SOLVED: To effect distance measurement of high resolution and high precision without using a position detection element. SOLUTION: A laser beam is scanned in the direction of an x-axis by oscillating an oscillator 16 mounting a semiconductor laser 12. The semiconductor 12 and a pinhole...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To effect distance measurement of high resolution and high precision without using a position detection element. SOLUTION: A laser beam is scanned in the direction of an x-axis by oscillating an oscillator 16 mounting a semiconductor laser 12. The semiconductor 12 and a pinhole 84 are disposed along the direction of the x-axis. Positive reflection light from a face to be measured 2 enters a light receiving element 156 via the pinhole 84. On one reciprocal scanning, reflection light enters the light receiving element 156 two times. Since the incident time interval of two incident beams is changed in response to a distance L up to the face to be measured 2, the distance L can be found by measuring the time interval. |
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