RESIST APPLYING DEVICE

PROBLEM TO BE SOLVED: To form a uniform coating film on a glass substrate by maintaining the liquid level of a resist filled in a receiving tray constant. SOLUTION: The receiving tray 4 is provided with an auxiliary liquid tank 9 for detecting a liquid level height communicated with the receiving tr...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SHIBA MITSUAKI, IMABAYASHI YOSHITAKA, YANASE HIROYASU, ICHIMURA YUKIO
Format: Patent
Sprache:eng
Schlagworte:
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