HEAT TREATMENT DEVICE

PROBLEM TO BE SOLVED: To provide a heat treatment device wherein creep of a heater wire and its elongation due to thermal expansion or the like can be prevented from accumulating to one end side and durability of the heater wire can be improved. SOLUTION: In a heat treatment device equipped with a s...

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Bibliographische Detailangaben
Hauptverfasser:	NAKAO MASARU, KOBAYASHI MAKOTO, OSANAI CHOEI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a heat treatment device wherein creep of a heater wire and its elongation due to thermal expansion or the like can be prevented from accumulating to one end side and durability of the heater wire can be improved. SOLUTION: In a heat treatment device equipped with a spiral-shaped heater wire 9 disposed around a reaction tube 3, a cylindrical heat insulating material 10 disposed around this heater wire 9, and supporting bodies for supporting, on an inner circumference of this heat insulating material 10, the heater wire 9 at fixed intervals in a thermally expandable and thermally contractable manner, the heater wire 9 is fixed to the heat insulating material 10 via fixing means 21 at every appropriate number of turns.