SURFACE INSPECTING APPARATUS AND METHOD

PROBLEM TO BE SOLVED: To provide a surface inspecting apparatus and method which improve a measuring accuracy in the inspection of a surface based on output signals of two photodetectors. SOLUTION: An optical element 25 is provided and the optical axis of scanning light 32 incident into a mounted su...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	NAKASHIRO MASAHIRO, TATSUTA TAKESHI
Format:	Patent
Sprache:	eng
Schlagworte:	CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS PRINTED CIRCUITS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a surface inspecting apparatus and method which improve a measuring accuracy in the inspection of a surface based on output signals of two photodetectors. SOLUTION: An optical element 25 is provided and the optical axis of scanning light 32 incident into a mounted substrate 7 is moved by the optical element 25 so that positions of light irradiating photodetecting surfaces 91 of two photodetectors 9 coincide or almost coincide. Thus, surface information signals of an object to be inspected separately sent by the two photodetectors 9 can coincide with each other or a difference therebetween can be minimized, thereby improving measuring accuracy in the inspection of the surface.