LIGHTING EQUIPMENT

PROBLEM TO BE SOLVED: To provide a compact lighting equipment capable of realizing high rigidity. SOLUTION: A lighting equipment is provided with an illumination means 68 collecting measuring illumination light beams to the surface of a sample. The illumination means is provided with a light collect...

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Bibliographische Detailangaben
1. Verfasser:	MISHIMA SHUZO
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BLASTING FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF HEATING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MECHANICAL ENGINEERING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR TESTING WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a compact lighting equipment capable of realizing high rigidity. SOLUTION: A lighting equipment is provided with an illumination means 68 collecting measuring illumination light beams to the surface of a sample. The illumination means is provided with a light collecting optical system spliced to an approximately cylindrical selfock lens 88 and a light collecting position adjusting mechanism for adjusting the light collecting position of the light collecting optical system while holding the light collecting optical system. The light collecting optical system is provided with an approximately cylindrical light wave guide member 90 and a light reflection surface 90a making a predetermined slant angle θ1 with the optical axis A is formed on the tip of the light wave guide member. The light collecting position adjusting mechanism is provided with a holding means for holding the light wave guide member rotatably about the optical axis, a rotational angle adjusting mechanism provided in the holding means to rotate the light wave guide member rotatably about the optical axis and a deflection amount adjusting mechanism provided in the holding means to flex the light wave guide member in a predetermined direction.