SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To easily find out the sample or a portion to be observed by disposing mirrors on an electron gun side, around a sample stage and under a sample stage, and catching the optical entire images of the sample and the sample stage viewed from an electron gun by means of a camera dis...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: NAKAZONO RYUICHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!