SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To easily find out the sample or a portion to be observed by disposing mirrors on an electron gun side, around a sample stage and under a sample stage, and catching the optical entire images of the sample and the sample stage viewed from an electron gun by means of a camera disposed farther under the mirror disposed under the sample stage. SOLUTION: A mirror 6 is disposed on an electron gun 1 side, to reflect downward the images of a sample stage 3 and a sample 2 placed on the sample stage 3. The mirror 6 is disposed in such a manner as not to prevent emission of electrons from an electron gun 1. Mirrors 7 housed inside a sample chamber 4 introduce an optical image reflected by the mirror 6 on the electron gun 1 side toward a camera 9. A mirror 8 is disposed in curve in front of the camera 9 in such a manner as to reflect the entire image of the sample 2 or the sample stage 3. Although the position of the mirror 6 on the electron gun 1 side cannot be changed, the positions of the mirrors 7, 8 can be adjusted in such a manner as to clearly catch the entire optical image by the camera 9.