METHOD FOR MEASURING DENSITY OF THIN FILM

PROBLEM TO BE SOLVED: To calculate the density ρ of a thin film on the surface of a sample by making the X-ray incident on the sample at a low angle, and detecting the reflected and refracted X-ray by the sample to be substituted in the prescribed formula. SOLUTION: The X-ray 1 is incident on a samp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RYU KOSUKE, KAWATO SEIJI, KUDO YOSHIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!