METHOD FOR MEASURING DENSITY OF THIN FILM

PROBLEM TO BE SOLVED: To calculate the density ρ of a thin film on the surface of a sample by making the X-ray incident on the sample at a low angle, and detecting the reflected and refracted X-ray by the sample to be substituted in the prescribed formula. SOLUTION: The X-ray 1 is incident on a sample 10 at a low angle through a monochrometer 4 and a slit 5, the reflected X-ray 2 from the sample 10 is detected by a slit 6 and a detector 7, the critical angle θc of total reflection of the sample is obtained from the intensity distribution, the refracted X-ray 3 is detected from a slit 8 and a detector 9 to obtain the angle θ0 of the Bragg peak of the sample. A thin film on the surface of the sample 10 is removed, and the critical angle θc' of total reflection and the angle θ0' of the Bragg peak are obtained through the similar measurement. The data are substituted in the formula for operation, where the double sign means + when θc>=θc', and - when θc