METHOD AND APPARATUS FOR AUTO-ALIGNMENT
PROBLEM TO BE SOLVED: To provide an auto-alignment method in which the position of the fixed mirror and that of the moving mirror of a corner-cube mirror-type interferometer are aligned easily. SOLUTION: An auto-alignment method is provided with an input process (S1) in which an alignment start sign...
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| creator | TSUKADA HIROSHI WAKIMOTO NORIO MINEO HIROSHI SEO TSUGIO SOGA YOSHIAKI KASHIWABARA HARUICHI NAGOSHI TOSHIYUKI |
| description | PROBLEM TO BE SOLVED: To provide an auto-alignment method in which the position of the fixed mirror and that of the moving mirror of a corner-cube mirror-type interferometer are aligned easily. SOLUTION: An auto-alignment method is provided with an input process (S1) in which an alignment start signal indicating the start of an alignment correction is input to a corner-cube mirror-type interferometer, a search process (S2) in which, when the alignment start signal is input by the input process (S1), a fixed mirror or a moving mirror is moved in a plane at right angles to an optical axis and in which the coordinate value of its vertex is made to agree with the coordinate value of the optical axis and a temporary fixation process (S3) in which the fixed mirror or the moving mirror is fixed temporarily on the basis of a last coordinate value which is detected by the search process (S2). |
| format | Patent |
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SOLUTION: An auto-alignment method is provided with an input process (S1) in which an alignment start signal indicating the start of an alignment correction is input to a corner-cube mirror-type interferometer, a search process (S2) in which, when the alignment start signal is input by the input process (S1), a fixed mirror or a moving mirror is moved in a plane at right angles to an optical axis and in which the coordinate value of its vertex is made to agree with the coordinate value of the optical axis and a temporary fixation process (S3) in which the fixed mirror or the moving mirror is fixed temporarily on the basis of a last coordinate value which is detected by the search process (S2).</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING |
| title | METHOD AND APPARATUS FOR AUTO-ALIGNMENT |
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