METHOD AND APPARATUS FOR AUTO-ALIGNMENT

PROBLEM TO BE SOLVED: To provide an auto-alignment method in which the position of the fixed mirror and that of the moving mirror of a corner-cube mirror-type interferometer are aligned easily. SOLUTION: An auto-alignment method is provided with an input process (S1) in which an alignment start sign...

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Bibliographische Detailangaben
Hauptverfasser:	TSUKADA HIROSHI, WAKIMOTO NORIO, MINEO HIROSHI, SEO TSUGIO, SOGA YOSHIAKI, KASHIWABARA HARUICHI, NAGOSHI TOSHIYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an auto-alignment method in which the position of the fixed mirror and that of the moving mirror of a corner-cube mirror-type interferometer are aligned easily. SOLUTION: An auto-alignment method is provided with an input process (S1) in which an alignment start signal indicating the start of an alignment correction is input to a corner-cube mirror-type interferometer, a search process (S2) in which, when the alignment start signal is input by the input process (S1), a fixed mirror or a moving mirror is moved in a plane at right angles to an optical axis and in which the coordinate value of its vertex is made to agree with the coordinate value of the optical axis and a temporary fixation process (S3) in which the fixed mirror or the moving mirror is fixed temporarily on the basis of a last coordinate value which is detected by the search process (S2).