CHARGED PARTICLE DEVICE HAVING TILT COLUMN

PROBLEM TO BE SOLVED: To significantly alleviate restraining of stage design by symmetrically tilting a stage over a small tilt angle in order to increase an incident angle of a beam with respect to a system. SOLUTION: An electronic optical column 14 for irradiating on a sample 22 such as an X-ray operation stage 24 is tilted by a given angle to an opposite side of a perpendicular line 246 from a normal line 252 such as a stage 24. Here, a maximum incident angle of the beam on the sample 22 with respect to he normal line 252 such as the stage 24 is equal to a sum of a first angle C and a second angle D. This maximum angle can be tilted symmetrically over a relatively small tilt angle (30 degrees at maximum in this example), but a stage at which an incident angle of a beam with respect to a sample that the stage supports is relatively large (for example, 60 degrees) can be used. Thereby, a design burden on a stage tilting mechanism significantly decreases, and a large-scale system can be handled at a tilt angle greater than that of a conventional system.