DEVICE FOR EXTRACTING CIRCUIT PARAMETER AND METHOD FOR CALCULATING DELAY

PROBLEM TO BE SOLVED: To extract and correct circuit parameters for the purpose of correcting the difference between the design values of circuit constants generating finish values of a pattern and the finish values. SOLUTION: A circuit parameter extracting device is provided with a step 112B being...

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Bibliographische Detailangaben
1. Verfasser:	HATSUDA TSUGUYASU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To extract and correct circuit parameters for the purpose of correcting the difference between the design values of circuit constants generating finish values of a pattern and the finish values. SOLUTION: A circuit parameter extracting device is provided with a step 112B being a means for judging whether or not a design value DD3 of an extracted distance between gate electrode writings is larger than a normal value (h), a step 114B being a means for judging the presence of the influence of the reflection and interference of an exposed light when the DD3